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Multiple patterning
Results: 57

#	Item
1	List of Leading EUVL Technical Challenges 2015 International Workshop on EUVL Makena Beach, Maui, Hawaii, June 15-19, 2015 Source Power scaling of Sn LPP sources to 250 W Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2015-02-11 16:39:27 Resist Actinism Physics Chemistry Electromagnetism Next-generation lithography Extreme ultraviolet lithography Extreme ultraviolet Multiple patterning
2	Graduate Seminar Design for Manufacturability and Reliability in Extreme Scaling and Beyond ECE Seminar Committee Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2015-01-31 02:10:36 Design Telecommunications engineering Very-large-scale integration Three-dimensional integrated circuit International Conference on Computer-Aided Design Design for manufacturability International Symposium on Physical Design Multiple patterning Electric Electronic engineering Electronics Integrated circuits
3	Design Impact of FinFETs Carey Robertson Product Marketing Director Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2014-05-28 12:18:25 Mentor Graphics Multiple patterning Multigate device Back end of line Design rule checking Electromagnetic field solver Electronic engineering Electronics Electronic design automation
4	Datasheet Sentaurus Lithography Predictive Modeling of Lithographic Processes Overview Add to Reading List Source URL: www.synopsys.com Language: English - Date: 2014-11-07 14:34:17 Computational lithography Extreme ultraviolet lithography Multiple patterning Photolithography Immersion lithography Optical proximity correction Resist Lithography Electron beam lithography Microtechnology Materials science Technology
5	At The Edge EM EXPLORER Simulation of Wafer Topography Effects in Double Patterning Lithography Add to Reading List Source URL: emexplorer.net Language: English - Date: 2009-02-15 16:35:45 Science Multiple patterning Resist Wafer Finite-difference time-domain method Photolithography Chemical-mechanical planarization Semiconductor device fabrication Physics Technology
6	UOM-Research-Sec-RGB-Materials Add to Reading List Source URL: materials.unimelb.edu.au Language: English - Date: 2014-01-09 22:44:55 Plastics Multiple patterning Nanolithography Resist Polymer Ultraviolet Poly Photoresist Layer by layer Materials science Chemistry Microtechnology
7	PDF Document Add to Reading List Source URL: spie.org Language: English - Date: 2015-04-01 16:45:15 The Mask SPIE Photomask Extreme ultraviolet lithography Multiple patterning Photolithography Mask inspection Mask shop KLA Tencor Materials science Microtechnology Technology
8	Physical IP Development On FinFET – There’s Nothing Planar About It! Navraj Nandra March 25th 2014 Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2014-05-28 12:17:53 Multiple patterning Transistor Design rule checking Technology Multigate device Electronic engineering Synopsys
9	GSA AMS Working Group Meeting Microsemi, San Jose, CA \| May 7, 2014 AMS Working Group Meeting Minutes from the meeting February 20, 2014 Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2014-07-21 16:00:34 Silvaco Parasitic extraction Multiple patterning Transistor Altera TSMC Microsemi Signal integrity Mentor Graphics Electronic engineering Multigate device Electronic design automation
10	ROLE OF MASK IN COST AND CAPABILITY DYNAMICS FOR SUB 14NM PATTERNING GSA SUPPLY CHAIN WORKING GROUP BRYAN KASPROWICZ Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2014-08-22 15:55:17 Multiple patterning Photomask EBeam

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