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Next-generation lithography
Results: 17

#	Item
1	Photonic Professional The next generation of 3D laser lithography High speed micro- and nanoprinting GT Add to Reading List Source URL: www.nanoscribe.de Language: English - Date: 2015-01-07 05:26:00 Optics Emerging technologies Photonics Metamaterials Photonic crystal Multiphoton lithography 3D printing Nanolithography Laser Microelectromechanical systems Nanoimprint lithography
2	Photonic Professional The next generation of 3D laser lithography High speed micro- and nanoprinting GT Add to Reading List Source URL: www.nanoprecision-3d.com Language: English - Date: 2015-04-23 22:20:25
3	Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography SONG Inho, MOHANTY R. Smruti, WATANABE Masato, KAWAMURA Toru, OKINO Akitoshi, HORIOKA Kazuhiko and HOTTA Eiki Department of Energy Sc Add to Reading List Source URL: www.jspf.or.jp Language: English - Date: 2005-10-18 01:47:32
4	List of Leading EUVL Technical Challenges 2015 International Workshop on EUVL Makena Beach, Maui, Hawaii, June 15-19, 2015 Source Power scaling of Sn LPP sources to 250 W Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2015-02-11 16:39:27 Resist Actinism Physics Chemistry Electromagnetism Next-generation lithography Extreme ultraviolet lithography Extreme ultraviolet Multiple patterning
5	Drivers for 3D IC and Interposers • High future cost of lithography for next generation silicon Add to Reading List Source URL: www.gsaglobal.org Language: English - Date: 2014-07-24 00:51:03 Technology Three-dimensional integrated circuit Systems engineering Wafer Reliability engineering Semiconductor device fabrication Integrated circuits Electronics
6	Extreme Ultraviolet Lithography: Towards the Next Generation of Integrated Circuits THE VIEWPOINT - Optical lattice solitons: Guiding and routing light at will Add to Reading List Source URL: opfocus.org Language: English - Date: 2010-03-11 13:42:27 Extreme ultraviolet lithography Multiple patterning Immersion lithography Photolithography Extreme ultraviolet Photoresist 11 nanometer X-ray lithography ASML Holding Microtechnology Materials science Technology
7	SURFACE AND INTERFACE DYNAMICS IN MULTILAYERED SYSTEMS Ph.D. committee Chair: prof. dr. ir. B. Poelsema Secretary: Add to Reading List Source URL: doc.utwente.nl Language: English - Date: 2011-08-28 11:51:47 Multiple patterning Extreme ultraviolet Next-generation lithography Optical coating Photolithography Ultraviolet 11 nanometer Electromagnetic radiation Materials science Extreme ultraviolet lithography
8	nPoint, Inc. High-Speed Multi-Axis Nanopositioning Systems for Next-Generation Metrology and Lithography More Accurate and Reliable Tools Aid the Development of New Nanotechnology Applications Technology and Innovation Add to Reading List Source URL: dtsn.darpa.mil Language: English - Date: 2013-08-08 14:07:14 Surveillance Infrared Metrology National security Technology DARPA Security Space-Based Infrared System
9	INSTITUTE OF PHYSICS PUBLISHING METROLOGIA Metrologia[removed]S229–S232 Add to Reading List Source URL: physics.nist.gov Language: English - Date: 2010-08-18 08:54:34 Radiation Electromagnetic spectrum Extreme ultraviolet lithography Optical coating Monochromator Extreme ultraviolet Ultraviolet Next-generation lithography X-ray Electromagnetic radiation Physics Spectroscopy
10	Microsoft Word - Advanced linear and nonlinear optical metrology in support of next.doc Add to Reading List Source URL: www.nist.gov Language: English - Date: 2010-07-21 15:47:32 Electromagnetic radiation Nonlinear optics Photolithography Next-generation lithography Dispersion Laser Extreme ultraviolet lithography Immersion lithography Optics Physics Photonics

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