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16 nanometer
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1	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-27 14:06:28 International Technology Roadmap for Semiconductors Integrated circuit Electronic engineering 16 nanometer 180 nanometer 90 nanometer 22 nanometer Microtechnology Low-k dielectric Materials science
2	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-27 14:06:28 International Technology Roadmap for Semiconductors Integrated circuit Electronic engineering 16 nanometer 180 nanometer 90 nanometer 22 nanometer Microtechnology Low-k dielectric Materials science
3	NOVEL APPROACH TO PRODUCE NANOPATTERNED TITANIUM IMPLANTS BY COMBINING NANOIMPRINT LITHOGRAPHY AND REACTIVE ION ETCHING. Add to Reading List Source URL: www.rsc.org Language: English - Date: 2010-08-27 05:33:00 Technology Microelectromechanical systems Nanoimprint lithography Etching Deep reactive-ion etching Reactive-ion etching Nanolithography 16 nanometer 11 nanometer Materials science Microtechnology Semiconductor device fabrication
4	Microsoft PowerPoint - BEUV Dublin1.3ho .ppt Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2010-12-02 11:22:35 22 nanometer 16 nanometer Ultraviolet Extreme ultraviolet 32 nanometer Multiple patterning 11 nanometer Angular resolution Next-generation lithography Electromagnetic radiation Extreme ultraviolet lithography Photolithography

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