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Planarization
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#	Item
11	FRAUNHOFER-INSTITUT FÜR I nte g rierte S y steme un d B aue l ementete c hno l o g ie I I S B Towards 450 mm Add to Reading List Source URL: www.iisb.fraunhofer.de Language: English - Date: 2015-06-10 03:01:05 Microtechnology Visual arts Metalworking Etching Polishing Flatness Wafer Metrology Chemical-mechanical planarization Semiconductor device fabrication Technology Materials science
12	Chemical Mechanical Polishing (CMP) Metrology with Advanced Surface Profiler >>> Figure 1. The key matrices of metal chemical mechanical Add to Reading List Source URL: www.nanowerk.com Language: English - Date: 2011-11-12 18:00:00 Chemical-mechanical planarization Science Park Systems Wafer Profilometer Atomic force microscopy 1 micrometre Semiconductor device fabrication Technology Materials science
13	Education related articles Wendell, K., Kendall, A., Portsmore, M., Wright, C., Jarvin, L., & Rogers, C[removed]Embedding elementary school science instruction in engineering design problem solving. In S. Purzer, J. Str Add to Reading List Source URL: www.tufts.edu Language: English - Date: 2014-12-31 13:12:36 American Society for Engineering Education ASME Engineering Technology Semiconductor device fabrication Rogers Chemical-mechanical planarization
14	At The Edge EM EXPLORER Simulation of Wafer Topography Effects in Double Patterning Lithography Add to Reading List Source URL: emexplorer.net Language: English - Date: 2009-02-15 16:35:45 Science Multiple patterning Resist Wafer Finite-difference time-domain method Photolithography Chemical-mechanical planarization Semiconductor device fabrication Physics Technology
15	A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding Add to Reading List Source URL: deepblue.lib.umich.edu Language: English - Date: 2013-09-17 15:11:17 Technology Microelectromechanical systems Etching Wafer Microfabrication Deep reactive-ion etching Chemical-mechanical planarization Thermal oxidation Silicon on insulator Semiconductor device fabrication Materials science Microtechnology
16	Capabilities Service Details Specific application Add to Reading List Source URL: www.ipms.fraunhofer.de Language: English - Date: 2015-01-15 19:37:11 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Bulk micromachining Deep reactive-ion etching Chemical-mechanical planarization Materials science Microtechnology Technology
17	Robust TSV ViaMiddle and ViaReveal Process Integration Accomplished through Characterization and Management of Sources of Variation Add to Reading List Source URL: www.appliedmaterials.com Language: English - Date: 2014-05-27 18:47:55 Microtechnology Chemical-mechanical planarization Etching Back end of line Copper interconnect Through-silicon via Wafer Chemical vapor deposition Three-dimensional integrated circuit Semiconductor device fabrication Electronics Technology
18	Reference List by Module[removed]Arizona Board of Regents for The University of Arizona Manufacturing Overview Add to Reading List Source URL: www.erc.arizona.edu Language: English - Date: 1999-12-02 13:42:10 Microtechnology Chemical-mechanical planarization Etching Polishing Semiconductor Solid Copper interconnect Semiconductor device fabrication Materials science Technology
19	A world-class innovation centre accelerating the commercialization of next-generation electronic products 1 Add to Reading List Source URL: www.c2mi.ca Language: English - Date: 2012-07-31 15:50:12 Technology Microelectromechanical systems Etching Metrology Wafer Electron microscope Chemical-mechanical planarization Stepper Semiconductor device fabrication Materials science Microtechnology
20	Applied Reflexion® LK Prime™ CMP System Enabling High-Volume Manufacturing of Advanced 3D Microchips July 7, 2014 Add to Reading List Source URL: www.appliedmaterials.com Language: English - Date: 2014-07-03 18:57:40 Multigate device Semiconductor device fabrication Chemical-mechanical planarization Wafer

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