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Bulk micromachining
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1	Capabilities Service Details Specific application Add to Reading List Source URL: www.ipms.fraunhofer.de Language: English - Date: 2015-01-15 19:37:11 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Bulk micromachining Deep reactive-ion etching Chemical-mechanical planarization Materials science Microtechnology Technology
2	Chapter 2.4 msink4 Operation (msink4[removed] Add to Reading List Source URL: nanolab.berkeley.edu Language: English - Date: 2014-08-06 10:07:02 Etching Technology Tetramethylammonium hydroxide Microelectromechanical systems Bulk micromachining Photoresist Potassium hydroxide Glass etching Industrial etching Chemistry Materials science Microtechnology
3	CMC Technology Codes CMOS65nm (TSMC) – CS CMOS65nm (ST) - CN CMOS90nm (TSMC) - CR CMOS90nm (ST) - CL CMOSP8C - CH, with bulk micromachining - MH Add to Reading List Source URL: www.cmc.ca - Date: 2012-03-16 13:17:38
4	1– 6 February Technical Summaries www.spie.org/pw Conferences and Courses Add to Reading List Source URL: spie.org Language: English - Date: 2014-10-28 11:09:21 Technology Microelectromechanical systems Microfabrication Micro-Opto-Electro-Mechanical Systems Deep reactive-ion etching Etching Photolithography Graphene Bulk micromachining Materials science Microtechnology Semiconductor device fabrication
5	PDF Document Add to Reading List Source URL: www.wiley-vch.de Language: English - Date: 2013-04-03 21:06:05 Chemistry Microelectromechanical systems Surface micromachining Microsystem Micromachinery Bulk micromachining Silicon on insulator Silicon Integrated circuit Microtechnology Materials science Technology
6	227 Introduction to Micro-Electro-Mechanical Systems (MEMS) Add to Reading List Source URL: www.nectec.or.th Language: English - Date: 2003-02-18 23:39:28 Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Deformable mirror Microfabrication Surface micromachining Micromachinery Bulk micromachining Beam steering Microlens Microtechnology Materials science Technology
7	Surface Micromachining for Microelectromechanical Systems JAMES M. BUSTILLO, ROGER T. HOWE, FELLOW, IEEE, AND Add to Reading List Source URL: www.ee.nthu.edu.tw Language: English - Date: 2004-02-25 03:13:04 Semiconductor device fabrication Nanotechnology Microelectromechanical systems Surface micromachining Polycrystalline silicon Chemical vapor deposition Bulk micromachining Epitaxy Deep reactive-ion etching Materials science Microtechnology Technology

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