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Microtechnology
Results: 1588

#	Item
61	Langmuir 2004, 20, Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2004-09-07 14:36:00 Silicones Thin films Soft lithography Display technology Emerging technologies Microtechnology PDMS stamp Polydimethylsiloxane Self-assembled monolayer Nanotransfer printing Photolithography Electron beam physical vapor deposition
62	Negative Resists for Ultra-Tall, High Aspect Ratio Microstructures S. Lemkea, P. Goetterta, I. Rudolpha, J. Goettertb,, B. Löchela a Helmholtz-Zentrum Berlin (HZB) für Materialien und Energie GmbH, Institute for Nanom Add to Reading List Source URL: www.camd.lsu.edu Language: English* - Date: 2012-08-02 10:05:16 Materials science Microtechnology Polymers LIGA Photoresist SU-8 photoresist X-ray lithography Poly Resist X-ray Microelectromechanical systems HARMST
63	A Demonstration of Broadband RF Sensing: Empirical Polysilicon Etch Rate Estimation in a Lam 9400 Etch Tool Craig Garvin and J. W. Grizzle Department of Electrical Engineering and Computer Science, University of Michigan Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:11 Semiconductor device fabrication Analog circuits Plasma processing Electronic filter topology Microtechnology Reactive-ion etching Crystal oscillator Etching Plasma etching RLC circuit Plasma Q factor
64	Compensation for transient chamber wall condition using realtime plasma density feedback control in an inductively coupled plasma etcher Pete I. Klimecky, J. W. Grizzle, and Fred L. Terry, Jr. Department of Electrical En Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:14 Semiconductor device fabrication Plasma processing Plasma physics Microtechnology Measuring instruments Plasma Reactive-ion etching Langmuir probe Crystal oscillator Etching Microwave Plasma diagnostics
65	ABSTRACT There is an increasing demand for reliable sensor system capable of sensing and measuring interested data at a remote place. Sensors combined with wireless communication system can be an effective telemetry meth Add to Reading List Source URL: www.gradschool.sc.edu Language: English - Date: 2016-07-28 15:43:48 Microtechnology Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Sensor node Energy harvesting Wireless sensor network Radio frequency microelectromechanical system
66	Ultra-Thin Highly Deformable Composite Mirrors John Steeves∗ and Sergio Pellegrino† California Institute of Technology, Pasadena, CAOptical quality mirrors are heavy, expensive and difficult to manufacture. Th Add to Reading List Source URL: www.its.caltech.edu Language: English - Date: 2013-05-10 16:09:48 Composite materials Condensed matter physics Electrical phenomena Microtechnology Transducers Deformable mirror Piezoelectricity Lead zirconate titanate Carbon fiber reinforced polymer Mirror Ceramic Fiberglass
67	Copy of Session Schedule Combined Master.xlsx Add to Reading List Source URL: www.iwlpc.com Language: English - Date: 2016-08-15 13:37:41 Semiconductor device fabrication Integrated circuits Packaging Microtechnology Wafer-level packaging Three-dimensional integrated circuit Embedded Wafer Level Ball Grid Array SUSS MicroTec System in package Chip-scale package Through-silicon via Microelectromechanical systems
68	APPLICATION NOTE MICRO-OPTICS Nanoscribe’s 3D printer Photonic Professional GT allows producing almost arbitrary micro-shapes with optically smooth surfaces in an additive and tool-free way. This effectively circumvent Add to Reading List Source URL: www.nanoscribe.de Language: English - Date: 2016-07-26 03:59:44 Lenses Microlens Microtechnology Manufacturing Optics Integral imaging 3D printing
69	High-Aspect Ratio Deep Sub-Micron α-Si Gate Etch Process Control H.-M. Park, T. L. Brock, D. Grimard, J. W. Grizzle and F. L. Terry, Jr University of Michigan 195th Spring Meeting of ECS Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:12 Semiconductor device fabrication Microtechnology Etching Plasma processing Chemical milling Isotropic etching Plasma etching Microelectromechanical systems Buffered oxide etch
70	Sonderforschungsbereich 595 Elektrische Ermüdung in Funktionswerkstoffen Sonderkolloquium WS02. Add to Reading List Source URL: www.sfb595.tu-darmstadt.de Language: English - Date: 2016-08-18 22:20:42 Electrical phenomena Condensed matter physics Transducers Microtechnology Ceramic materials Piezoelectricity Energy harvesting Ceramic Ferroelectricity Lead zirconate titanate Sonar Crystal

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