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Gate oxide
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#	Item
1	High-Aspect Ratio Deep Sub-Micron α-Si Gate Etch Process Control H.-M. Park, T. L. Brock, D. Grimard, J. W. Grizzle and F. L. Terry, Jr University of Michigan 195th Spring Meeting of ECS Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:12 Semiconductor device fabrication Microtechnology Etching Plasma processing Chemical milling Isotropic etching Plasma etching Microelectromechanical systems Buffered oxide etch
2	Atomic layer etching of HfO2 film for gate oxide in MOSFET devices Nano Lee1, Nano Choi2, and Nano Kim1, 2, 3* 1 SKKU Advanced Institude of Nano Technology(SAINT), Sungkyunkwan University, Suwon, Kyunggi-do, Sou Add to Reading List Source URL: sympo.nanokorea.or.kr Language: English - Date: 2015-12-28 20:11:39
3	PDF Document Add to Reading List Source URL: www.princeton.edu Language: English - Date: 2006-08-19 17:00:54 Semiconductor devices Computer memory Threshold voltage Gate oxide Integrated circuits Field-effect transistor Transistor Floating Gate MOSFET Coulomb blockade Electrical engineering Electronics Electronic engineering
4	Photon Factory Activity Report 2008 #26 Part BSurface and Interface 2C/2005S2-002 Control of oxidation and reduction in HfSiON/Si through N2 exposure Hiroyuki KAMADA1, Tatsuhiko TANIMURA1, Satoshi TOYODA1-3, Hir Add to Reading List Source URL: pfwww.kek.jp Language: English* - Date: 2010-01-05 10:36:03 Thin film deposition Electronic engineering High-k dielectric Transistors Ceramic materials Gate dielectric Atomic layer deposition Annealing Equivalent oxide thickness Chemistry Materials science Electromagnetism
5	Photon Factory Activity Report 2009 #27 Part BSurface and Interface 2C/2008S2003 Interfacial reactions for Ru metal-electrode/HfSiON gate stack structures studied Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-12-27 22:22:07 Semiconductor device fabrication Superhard materials Transistors Ceramic materials Atomic layer deposition High-k dielectric Ruthenium(IV) oxide Silicon dioxide Titanium nitride Chemistry Matter Electronic engineering
6	Microsoft Wordrevised Add to Reading List Source URL: rs.ieee.org Language: English - Date: 2011-06-08 19:42:34 Semiconductors Semiconductor device fabrication Transistors High-k dielectric Leakage Equivalent oxide thickness SILC Gate dielectric Capacitor Electromagnetism Electrical engineering Electronic engineering
7	AMDp2 - 5 High-Performance and Low-Temperature-Compatible Solid Phase Crystallized Polycrystalline Silicon Thin Film Transistors Using Thermal Oxide Buffered Aluminum Oxide as Gate Dielectric Add to Reading List Source URL: www.pskl.ust.hk Language: English - Date: 2014-10-10 03:11:48 Electronics Semiconductor device fabrication Electronic engineering Transistors High-k dielectric Thin-film transistor Equivalent oxide thickness Chemical vapor deposition Thermal oxidation Chemistry Semiconductors Technology
8	P-22: Top-Gate Thin Film Transistor with ZnO:N Channel Fabricated by Room Temperature RF Magnetron Sputtering Add to Reading List Source URL: www.pskl.ust.hk Language: English - Date: 2014-10-10 03:11:50 Zinc oxide Atomic layer deposition Oxide thin film transistor Sputter deposition Thin-film transistor Center of Excellence in Nanotechnology at AIT Chemistry Thin film deposition Ultraviolet radiation
9	[removed]A New Self-Aligned Quantum-Well MOSFET Architecture Fabricated by a Scalable Tight-Pitch Process Add to Reading List Source URL: www-mtl.mit.edu Language: English - Date: 2014-04-22 16:21:50 Semiconductor devices Digital electronics Integrated circuits MOSFET 11 nanometer Indium gallium arsenide Gate oxide International Electron Devices Meeting Transistor Electronic engineering Electronics Chemistry
10	TF.1 Evaluation of Self-Heating and Hot Carrier Degradation of Poly-Si Thin-Film Transistors Using Charge Pumping Technique Add to Reading List Source URL: www.pskl.ust.hk Language: English - Date: 2014-10-10 02:44:39 Semiconductor device fabrication Semiconductors Semiconductor devices Hot carrier injection Negative bias temperature instability MOSFET Transistor Reliability Gate oxide Electronic engineering Electromagnetism Condensed matter physics

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