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Equivalent oxide thickness
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1	Photon Factory Activity Report 2008 #26 Part BSurface and Interface 2C/2005S2-002 Control of oxidation and reduction in HfSiON/Si through N2 exposure Hiroyuki KAMADA1, Tatsuhiko TANIMURA1, Satoshi TOYODA1-3, Hir Add to Reading List Source URL: pfwww.kek.jp Language: English* - Date: 2010-01-05 10:36:03 Thin film deposition Electronic engineering High-k dielectric Transistors Ceramic materials Gate dielectric Atomic layer deposition Annealing Equivalent oxide thickness Chemistry Materials science Electromagnetism
2	Microsoft Wordrevised Add to Reading List Source URL: rs.ieee.org Language: English - Date: 2011-06-08 19:42:34 Semiconductors Semiconductor device fabrication Transistors High-k dielectric Leakage Equivalent oxide thickness SILC Gate dielectric Capacitor Electromagnetism Electrical engineering Electronic engineering
3	AMDp2 - 5 High-Performance and Low-Temperature-Compatible Solid Phase Crystallized Polycrystalline Silicon Thin Film Transistors Using Thermal Oxide Buffered Aluminum Oxide as Gate Dielectric Add to Reading List Source URL: www.pskl.ust.hk Language: English - Date: 2014-10-10 03:11:48 Electronics Semiconductor device fabrication Electronic engineering Transistors High-k dielectric Thin-film transistor Equivalent oxide thickness Chemical vapor deposition Thermal oxidation Chemistry Semiconductors Technology
4	High-performance polycrystalline silicon thin-film transistors integrating sputtered aluminum-oxide gate dielectric with bridged-grain active channel Add to Reading List Source URL: www.pskl.ust.hk Language: English - Date: 2013-09-30 03:14:00 Semiconductors Physical quantities Electricity Transistors Electronic engineering High-k dielectric Equivalent oxide thickness Hot carrier injection Dielectric Physics Electromagnetism Materials science
5	Eur. Phys. J. Appl. Phys. 28, 265–[removed]DOI: [removed]epjap:[removed] Add to Reading List Source URL: www.stanford.edu Language: English - Date: 2005-04-28 19:13:20 Oxides Thin film deposition Ceramic materials Semiconductor device fabrication Digital electronics Atomic layer deposition Hafnium(IV) oxide MOSFET Equivalent oxide thickness Chemistry Electromagnetism Matter

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