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Gate dielectric
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#	Item
1	Electrically erasable non-volatile semiconductor memory Add to Reading List Source URL: ethw.org Language: English - Date: 2011-10-12 18:24:23 Electromagnetism Electrical engineering Electronic engineering Non-volatile memory Semiconductor devices MOSFETs Field-effect transistor Threshold voltage Computer memory Emerging technologies Gate dielectric Transistor
2	Photon Factory Activity Report 2005 #23Part BSurface and Interface 4C,6A,15C/2004G059 Residual Order in the Interfacial SiO2 Layer Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:32:23 Electronic engineering Transistors High-k dielectric Gate dielectric Thermal oxidation Semiconductor device fabrication Silicon dioxide Polycrystalline silicon Negative bias temperature instability Chemistry Electromagnetism Electronics
3	Surface and Interface 2C/2002S2-002 Chemical reaction and metallic cluster formation by annealing-temperature control in ZrO2 gate insulator on Si Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:30:04 Annealing Silicide Photoemission spectroscopy Chemistry Physics Electrical engineering Electronic engineering High-k dielectric Transistors
4	Photon Factory Activity Report 2006 #24 Part BSurface and Interface 2C/2005S2-002 Analysis of x-ray irradiation effect in high-k gate dielectrics by time-dependent Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:33:37 Emission spectroscopy Photoemission spectroscopy Atomic physics High-k dielectric Core electron Electron Physics Chemistry Spectroscopy
5	Photon Factory Activity Report 2006 #24 Part BChemistry 2C/2005S2-002 Thermal decomposition of LaAlO3/SiO2/Si gate stack structures studied by Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:34:17 Transistors Silicon dioxide Ultra-high vacuum MOSFET Gallium nitride Annealing Chemistry Electronic engineering High-k dielectric
6	Photon Factory Activity Report 2008 #26 Part BSurface and Interface 2C/2008S2-003 In-depth profiles of Hf-based gate insulator films on Si substrates studied by angle-resolved photoemission spectroscopy Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:36:04 High-k dielectric Transistors Physics Photoemission spectroscopy Chemistry Angle-resolved photoemission spectroscopy Annealing Layer Materials science Emission spectroscopy Semiconductor device fabrication Electronic engineering
7	Photon Factory Activity Report 2008 #26 Part BSurface and Interface 2C/2005S2-002 Control of oxidation and reduction in HfSiON/Si through N2 exposure Hiroyuki KAMADA1, Tatsuhiko TANIMURA1, Satoshi TOYODA1-3, Hir Add to Reading List Source URL: pfwww.kek.jp Language: English* - Date: 2010-01-05 10:36:03 Thin film deposition Electronic engineering High-k dielectric Transistors Ceramic materials Gate dielectric Atomic layer deposition Annealing Equivalent oxide thickness Chemistry Materials science Electromagnetism
8	Photon Factory Activity Report 2009 #27 Part BSurface and Interface 2C/2008S2003 Interfacial reactions for Ru metal-electrode/HfSiON gate stack structures studied Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-12-27 22:22:07 Semiconductor device fabrication Superhard materials Transistors Ceramic materials Atomic layer deposition High-k dielectric Ruthenium(IV) oxide Silicon dioxide Titanium nitride Chemistry Matter Electronic engineering
9	Photon Factory Activity Report 2005 #23Part BSurface and Interface 2C/2002S2-002 Annealing-temperature dependence: Mechanism of Hf silicidation in HfO2 gate Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:32:21 Transistors Annealing Silicon monoxide High-k dielectric Layer Silicon dioxide Silicide Photoemission spectroscopy Chemistry Semiconductor device fabrication Silicon compounds
10	Photon Factory Activity Report 2004 #22 Part BSurface and Interface 2C/2002S2-002 Crystallization in HfO2 gate insulators with in situ annealing Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:31:27 Physics Environmental chemistry Materials science Spectroscopy X-ray absorption spectroscopy High-k dielectric XANES Science Chemistry Condensed matter physics

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