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#	Item
991	1 Table MET1 Difficult Challenges ≥ 12 nm Factory level and company wide metrology integration for real-time in situ, integrated, and inline metrology Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-21 15:43:04 Microtechnology Technology Materials science Nanotechnology Metrology Semiconductor device fabrication Multigate device
992	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-30 21:14:00 Extreme ultraviolet lithography Multiple patterning Nanoimprint lithography Immersion lithography Electron beam lithography Maskless lithography Photomask Resist Lithography Microtechnology Materials science Technology
993	1 Assembly and Packaging Difficult Challenges Difficult Challenges[removed]Summary of Issues Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-31 09:28:23 Microtechnology Wafer Back end of line Microelectromechanical systems Three-dimensional integrated circuit Embedded Wafer Level Ball Grid Array Semiconductor device fabrication Electronics Technology
994	ACCEL DESCRIPTION The triaxial accelerometer is based on MEMS® (Micro Electro-Mechanical Systems) technology and has been developed for biomedical applications where cinematic and motion measurements are required. This Add to Reading List Source URL: www.biosignalsplux.com Language: English - Date: 2014-05-09 04:26:29 Microtechnology Engineering Microelectromechanical systems Accelerometers Technology Transducers
995	2014 Exhibition Guide www.spie.org/al Moving Technology to Market™ Exhibition Add to Reading List Source URL: spie.org Language: English - Date: 2014-11-20 04:22:54 SPIE Extreme ultraviolet lithography Photolithography Computational lithography Photomask Multiple patterning Lithography Microelectromechanical systems Synopsys Materials science Technology Microtechnology
996	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-13 15:51:20 Semiconductor device fabrication Electromagnetism Electrical engineering Mechanical engineering Microelectromechanical systems Transducers RF MEMS Accelerometer Microfabrication Microtechnology Materials science Technology
997	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-27 14:06:28 International Technology Roadmap for Semiconductors Integrated circuit Electronic engineering 16 nanometer 180 nanometer 90 nanometer 22 nanometer Microtechnology Low-k dielectric Materials science
998	RE-DEFINING INSPECTION JG&A Metrology Center is a specialized lab focused on providing 3D internal part inspection services using Industrial Computed Tomography Equipment. Industrial CT Scanning Add to Reading List Source URL: jgarantmc.com Language: English - Date: 2014-02-19 12:16:31 Materials science Medical physics Industrial CT scanning Microtechnology Nondestructive testing Tomography X-ray computed tomography Single-photon emission computed tomography Reverse engineering Medicine Imaging Technology
999	Precision Resonant Vibratory MEMS Sensors Navigation and Science Karl Yee (JPL) JPL MEMS Gyroscope (K. Yee, J. Gill) Add to Reading List Source URL: www.lpi.usra.edu Language: English - Date: 2014-08-08 17:15:24 Engineering Microtechnology Avionics Inertial navigation system Microelectromechanical systems Fibre optic gyroscope Inertial measurement unit Accelerometer Ring laser gyroscope Technology Gyroscopes Aircraft instruments
1000	Mini-Warriors Microelectromechanical Systems: A Munitions Revolution Dan Jean, Ph.D. n Dan Pines n Kevin Cochran Add to Reading List Source URL: www.navsea.navy.mil Language: English - Date: 2014-01-31 15:54:12 Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Electromagnetism Bomb disposal Artillery Engineering Artillery fuze Microtechnology Fuzes Technology