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Etching
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21	Vol. 25 • No. 9 • March 4 • 2015 www.afm-journal.de Advanced Functional Materials, Vol. 25, 2015, No. 9, pages 1329–1472 www.afm-journal.de Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2015-03-10 06:24:40 Microtechnology Materials science Electromagnetism Electromagnetic radiation Etching Semiconductor device fabrication Electrical engineering Transducers Microelectromechanical systems Infrared Crystalline silicon Thermographic camera
22	etchIDENT stencils allow you to permanently etch your VIN (vehicle identification number) onto your Add to Reading List Source URL: www.boslerinc.com Language: English - Date: 2012-02-28 23:43:21 Etching Graphic design Printing Printmaking Stencil Typewriter Windshield Glass etching
23	Produktblatt_CMP2016.indd Add to Reading List Source URL: www.screening-fab.com Language: English - Date: 2016-06-30 03:47:51 Semiconductor device fabrication Wafer KLA-Tencor Etching Applied Materials Silicon Saxony
24	A Demonstration of Broadband RF Sensing: Empirical Polysilicon Etch Rate Estimation in a Lam 9400 Etch Tool Craig Garvin and J. W. Grizzle Department of Electrical Engineering and Computer Science, University of Michigan Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:11 Semiconductor device fabrication Analog circuits Plasma processing Electronic filter topology Microtechnology Reactive-ion etching Crystal oscillator Etching Plasma etching RLC circuit Plasma Q factor
25	Compensation for transient chamber wall condition using realtime plasma density feedback control in an inductively coupled plasma etcher Pete I. Klimecky, J. W. Grizzle, and Fred L. Terry, Jr. Department of Electrical En Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:14 Semiconductor device fabrication Plasma processing Plasma physics Microtechnology Measuring instruments Plasma Reactive-ion etching Langmuir probe Crystal oscillator Etching Microwave Plasma diagnostics
26	Microsoft Word - Know-how Infodoc Add to Reading List Source URL: www.meab-mx.se Language: English - Date: 2010-01-10 06:56:54 Etching Chemical milling Printed circuit board Mixer-settler Isotropic etching Copper
27	High-Aspect Ratio Deep Sub-Micron α-Si Gate Etch Process Control H.-M. Park, T. L. Brock, D. Grimard, J. W. Grizzle and F. L. Terry, Jr University of Michigan 195th Spring Meeting of ECS Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:12 Semiconductor device fabrication Microtechnology Etching Plasma processing Chemical milling Isotropic etching Plasma etching Microelectromechanical systems Buffered oxide etch
28	To: A ll N anofab Users From: Tom Reynolds ESB Room 1109E, Ext 3918 Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2016-03-21 12:47:27 Polymers Microtechnology Acids Bases Equilibrium chemistry Photoresist Etching Solvent Acidbase reaction Polyethylene terephthalate
29	Microcontact Printing: Arrays of Silicon Micro/Nanostructures Formed in Suspended Configurations for Deterministic Assembly Using Flat and RollerType Stamps (Small) Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2011-03-01 06:52:52 Microtechnology Semiconductor device fabrication Microcontact printing Polydimethylsiloxane Crystalline silicon Etching Wafer Solar cell Silicon Gallium nitride Photolithography
30	Management of Voids in Processing of Bonded Wafers Dr. Shari Farrens, Chief Scientist, EV Group Inc. Dr. Lawrence W. Kessler, President, Sonoscan, Inc. Abstract This paper discusses the origination and detection of bondi Add to Reading List Source URL: www.sonoscan.com Language: English - Date: 2016-07-20 11:09:32 Semiconductor device fabrication Microtechnology Acoustic microscopy Wafer Void Chemical-mechanical planarization Microfabrication Microelectromechanical systems Megasonic cleaning Photolithography Etching

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