JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9

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Date: 2010-12-09 11:08:13 Technology Silicon on insulator Thermal oxidation Ion implantation Wafer Microelectromechanical systems Silicon on sapphire Smart Cut Epitaxy Semiconductor device fabrication Materials science Microtechnology		JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9 Add to Reading List Source URL: www.soitec.com Download Document from Source Website File Size: 1,22 MB Share Document on Facebook

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