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Thin Solid Films[removed]–57 Hot-wire chemical vapor deposition for epitaxial silicon growth on largegrained polycrystalline silicon templates M.S. Mason*, C.M. Chen, H.A. Atwater Thomas J. Watson Laboratory of A
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Document Date: 2007-07-14 19:05:50
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Thin Solid Films[removed]–57 Hot-wire chemical vapor deposition for epitaxial silicon growth on largegrained polycrystalline silicon templates M.S. Mason*, C.M. Chen, H.A. Atwater Thomas J. Watson Laboratory of A