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Semiconductor process simulation
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1	FRAUNHOFER INSTI TUTE FOR I NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB TECHNOLOGY S IMULATION THE TECHNOLOGY SIMULATION DEPARTMENT Add to Reading List Source URL: www.iisb.fraunhofer.de Language: English - Date: 2016-06-08 05:52:49 Engineering Process engineering Electronic design automation Semiconductor device fabrication Simulation software Simulation Process Resist Modeling and simulation Semiconductor Semiconductor process simulation Extreme ultraviolet lithography
2	Microsoft Word - Alcott_PetraSim.doc Add to Reading List Source URL: esd.lbl.gov Language: English - Date: 2014-11-14 11:47:22 Form Humanâ€“computer interaction Computing PLPAK Semiconductor process simulation User interface techniques Spreadsheet User interface
3	FRAUNHOFER INSTI TUTE FOR I NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB TECHNOLOGY S IMULATION THE TECHNOLOGY SIMULATION DEPARTMENT Add to Reading List Source URL: www.iisb.fraunhofer.de Language: English - Date: 2015-06-09 13:41:07 Technology Materials science Simulation Resist Reliability Modeling and simulation Process Crosslight Software Silvaco Electronic engineering Semiconductor device fabrication Electronic design automation
4	Toward Simulation-Based Design Mark S. Shephard Scientific Computation Research Center, Rensselaer Polytechnic Institute, Troy, NYMark W. Beall, Robert M. O’Bara, Bruce E. Webster Simmetrix, Inc., 10 Halfmoon Ex Add to Reading List Source URL: www.acusim.com Language: English - Date: 2012-11-11 10:13:09 Digital electronics Electronic design automation Computer-aided engineering Computer-aided design Simulation Logic simulation Semiconductor process simulation Crash simulation Electronic engineering Information technology management Product lifecycle management
5	DYNAMIC PREDICTION OF THE ENTIRE CZOCHRALSKI GROWTH PROCESS AND USE OF THE OFF-LINE CONTROL TECHNIQUE TO OPTIMIZE CRYSTAL SHAPE AND QUALITY R. Rolinsky2, L. Wu1, M. Jacot2, R. Ramaya Selvaraj2, A. de Potter2, N. Van den Add to Reading List Source URL: www.femagsoft.com Language: English* - Date: 2013-10-16 08:56:07 Semiconductor growth Mineralogy Matter Physics Materials science Czochralski process Crystal growth Simulation Crystal Crystals Chemistry Crystallography
6	Th e So ft w are fo r B ulk C ry s t al Grow t h S i mulat io n C ent er fo r Sy s t ems E ngin eeri n g an d Appli ed Mec h an ic s o f UC L Add to Reading List Source URL: www.femagsoft.com Language: English - Date: 2013-10-16 08:56:15 Semiconductor growth Crystallography Mineralogy Czochralski process Materials science Crystal Simulation Monocrystalline silicon Silicon Chemistry Crystals Matter
7	Global Simulation of CZ and FZ Bulk Crystal Growth: from Quasi-Dynamic and Dynamic Modelling to Process Control and Crystal Quality Optimization F. Dupreta,b, R. Rolinskyb, L. Wub, F. Loixb, A. de Potterb, N. Van den Bog Add to Reading List Source URL: www.femagsoft.com Language: English - Date: 2013-10-16 08:57:28 Crystallography Mineralogy Semiconductor growth Crystal growth Czochralski process Crystal Ingot Melting Thermal conductivity Chemistry Crystals Materials science
8	CHAM Product Update Pioneering CFD Software for Education & Industry PHOENICS-CVD Chemical Vapour Deposition Simulation Software For Equipment Design and Process Optimization Add to Reading List Source URL: www.cham.co.uk Language: English - Date: 2010-04-13 10:15:50 Coatings Vacuum Manufacturing Matter Chemical vapor deposition Plasma processing Polycrystalline silicon Amorphous silicon Atomic layer deposition Chemistry Thin film deposition Semiconductor device fabrication
9	Microelectronic Engineering[removed]–130 www.elsevier.com / locate / mee The use of numerical simulation to predict the unlocking stress of dislocations in Cz-silicon wafers a, Add to Reading List Source URL: www.webalice.it Language: English - Date: 2007-07-29 11:21:42 Deformation Dislocation Plasticity Solid mechanics Wafer Czochralski process Annealing Rapid thermal processing Hardening Materials science Semiconductor device fabrication Crystallographic defects
10	FabSim A (semiconductor) factory simulator The fabrication of modern semiconductor chips is one of the most complex manufacturing efforts ever seen. A typical process sequence has more than 300 steps, runs in a fab which Add to Reading List Source URL: www.fabsim.com Language: English - Date: 2004-11-16 14:58:12 Simulation Semiconductor device fabrication Semiconductor fabrication plant Logic simulation Emulator Simulation software Electronic engineering Electronic design automation Operations research

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