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Microfabrication
Results: 152

#	Item
61	A FULLY DRY SELF-ASSEMBLY PROCESS WITH PROPER IN-PLANE ORIENTATION Sangjun Park and Karl F. Böhringer Department of Electrical Engineering, University of Washington, Seattle, Washington, USA ABSTRACT A fully dry self-as Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2007-10-22 10:46:49 Technology Etching Deep reactive-ion etching Microfabrication Integrated circuit Three-dimensional integrated circuit Wafer Isotropic etching Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
62	Design and Fabrication of a Silicon-Based MEMS Rotary Engine Add to Reading List Source URL: www.me.berkeley.edu Language: English - Date: 2002-10-04 20:52:04 Technology Microelectromechanical systems Etching Deep reactive-ion etching Microfabrication Advanced Silicon Etch Photoresist Wankel engine Wafer Materials science Semiconductor device fabrication Microtechnology
63	INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng[removed]S1–S10 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-02 16:58:00 Materials science Microtechnology Self-organization Biochip Molecular biology Proteomics Self-assembled monolayer Microelectromechanical systems Microfabrication Chemistry Science Nanotechnology
64	Sensorless Manipulation Using Massively Parallel Microfabricated Actuator Arrays Karl-Friedrich Bohringer Bruce R. Donald Robert Mihailovich Noel C. MacDonald Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:08:00 Nanotechnology Microtechnology Robotics Materials science Motion control Microfabrication Valve Robot Science Actuators Technology Control theory
65	MEMS Fixtures for Handling and Assembly of Microparts Isam N. Tahhan 1,* 1 Yan Zhuang 2 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:32:00 Semiconductor device fabrication Nanotechnology Mechanical engineering Microelectromechanical systems Transducers Microfabrication Etching CMOS Integrated circuit Microtechnology Materials science Technology
66	INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng[removed]S91–S95 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-02 16:59:00 Technology Chemistry Deep reactive-ion etching Microelectromechanical systems Microfabrication Black silicon Etching Wafer Polyimide Materials science Semiconductor device fabrication Microtechnology
67	CV_Dr. Asim Nisar_ E & M DEPT Add to Reading List Source URL: www.case.edu.pk Language: English - Date: 2014-06-02 03:05:07 Nanotechnology Microfluidics Microfabrication Semiconductor device fabrication Micropump Microelectromechanical systems Materials science Microtechnology Technology
68	MEMS AND NANOTECHNOLOGY EXCHANGE FABRICATION SITE AGREEMENT CHECKLIST FOR PROCESSING MEMS AND NANOTECHNOLOGY EXCHANGE FABRICATION SITE AGREEMENT In order to facilitate the processing of your Fabrication Site Agreement, p Add to Reading List Source URL: www.mems-exchange.org Language: English - Date: 2011-11-22 10:20:15 Technology Fabrication Semiconductor fabrication plant Corporation for National Research Initiatives Microelectromechanical systems Microfabrication Electromagnetism Semiconductor device fabrication Microtechnology Materials science
69	Summary Dr. Maria Farsari is a Researcher at the Institute of the Electronic Structure and Laser, Foundation for Research and Technology-Hellas, where she joined in[removed]Her main research interests are multi-photon lith Add to Reading List Source URL: www.iesl.forth.gr Language: English - Date: 2014-01-22 04:30:08 Photonics Acronyms Laser Mode-locking Optics Communications Microfabrication Physics Optics Electromagnetic radiation
70	A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding Add to Reading List Source URL: deepblue.lib.umich.edu Language: English - Date: 2013-09-17 15:11:17 Technology Microelectromechanical systems Etching Wafer Microfabrication Deep reactive-ion etching Chemical-mechanical planarization Thermal oxidation Silicon on insulator Semiconductor device fabrication Materials science Microtechnology

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