Advanced Silicon Etch

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1	Design and Fabrication of a Silicon-Based MEMS Rotary Engine Add to Reading List Source URL: www.me.berkeley.edu Language: English - Date: 2002-10-04 20:52:04 Technology Microelectromechanical systems Etching Deep reactive-ion etching Microfabrication Advanced Silicon Etch Photoresist Wankel engine Wafer Materials science Semiconductor device fabrication Microtechnology
2	POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie, Lars Erdmann, Xu Zhu, Kaigham J. Gabriel† and Gary K. Fedder† Department of Electrical and Computer Engineering and † Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 11:06:39 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Deep reactive-ion etching Comb drive Advanced Silicon Etch Microtechnology Materials science Technology
3	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 10:40:36 Microelectromechanical systems Surface micromachining Etching Comb drive Microfabrication Deep reactive-ion etching Advanced Silicon Etch CMOS Micromachinery Microtechnology Materials science Technology