Design and Fabrication of a Silicon-Based MEMS Rotary Engine

First Page		Document Content
Date: 2002-10-04 20:52:04 Technology Microelectromechanical systems Etching Deep reactive-ion etching Microfabrication Advanced Silicon Etch Photoresist Wankel engine Wafer Materials science Semiconductor device fabrication Microtechnology		Design and Fabrication of a Silicon-Based MEMS Rotary Engine Add to Reading List Source URL: www.me.berkeley.edu Download Document from Source Website File Size: 732,38 KB Share Document on Facebook

	Design and Fabrication of a Silicon-Based MEMS Rotary Engine DocID: RQTk - View Document
	POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie, Lars Erdmann, Xu Zhu, Kaigham J. Gabriel† and Gary K. Fedder† Department of Electrical and Computer Engineering and † DocID: Rc9s - View Document
	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures DocID: QxsX - View Document