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Microelectromechanical systems / Surface micromachining / Etching / Comb drive / Microfabrication / Deep reactive-ion etching / Advanced Silicon Etch / CMOS / Micromachinery / Microtechnology / Materials science / Technology


JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures
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Document Date: 2005-06-13 10:40:36

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