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Microtechnology
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851	Design, Architecture & Embedded Software Division Leti is an institute of CEA, a French research-and-technology organization with activities in energy, IT, healthcare, defense and security. By creating innovation and tr Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2014-06-12 05:19:12 Microtechnology Minatec Embedded system International Solid-State Circuits Conference International Symposium on Circuits and Systems Very-large-scale integration Institute of Electrical and Electronics Engineers IEEE Transactions on Computers Ambient intelligence Engineering Technology Electronic engineering
852	News Release Nanoplas Announces Important New 14nm Order and Joint Development Agreement with CEA-Leti High-selectivity dry-etch for 14nm OEM pilot line will replace wet etch; CEA-Leti to qualify the system for addition Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2013-11-27 09:43:38 Technology Etching Plasma processing Microelectromechanical systems Transducers Dry etching Isotropic etching Plasma etching Wafer Semiconductor device fabrication Microtechnology Materials science
853	Patterning of GST for Non volatile Phase-Change Memory Applications B. Salhi1, T. Chevolleau1, C. Vizioz2, C. Jahan2, S. Maitrejean2, C. Vallee1, T. Baron1, and O. Joubert1 1LTM Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2012-05-24 09:20:21 Technology Physics Etching Plasma etching Plasma Gete GeSbTe Semiconductor device fabrication Materials science Microtechnology
854	6- Bonding LetiDay_ChDeguetfinal Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2014-07-18 03:18:39 Technology Wafer bonding Chemical bonding Semiconductor device fabrication Glass frit bonding Direct bonding Anodic bonding Wafer Microtechnology Electronics Electronics manufacturing
855	© IMEC[removed] FEOL ETCH CHALLENGES, FROM PLANAR METAL GATES TOWARDS Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2012-05-24 09:07:30 Microtechnology Extreme ultraviolet lithography Transistors Etching Multigate device IMEC Graphene High-k dielectric Polycrystalline silicon Materials science Technology Physics
856	Fluorocarbon-Based Passivation in STI Plasma Etching A.P. Milenina, R. Athimulama, M. Demanda, and B. Coenegrachtsb b Lam © IMEC[removed]CONFIDENTIAL Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2012-05-24 09:11:51 Microtechnology Semiconductor device fabrication IMEC Leuven 45 nanometer 65 nanometer Etching OK Confidential Materials science Technology Electronics
857	Mervi Paulasto-Kröckel Aalto University, School of Electrical Engineering, Electronics Integration and Reliability, Aalto (Finland) Professor Mervi Paulasto-Kröckel is chairing Electronics integration and reliability a Add to Reading List Source URL: www.nanofis.net Language: English - Date: 2014-07-23 02:47:25 Mechanical engineering Microelectromechanical systems Microtechnology Transducers Education Aalto University School of Electrical Engineering Semiconductor Equipment and Materials International Engineering Technology Aalto University Espoo
858	SiCl4/Cl2 plasmas: a new chemistry to etch high-k material selectively to Si-based alloys P. Bodarta, G. Cungea, C. Petit-Etiennea, M. Darnona, M. Haassa, S. Bannab, O.Jouberta and T.Lillb a CNRS-LTM, Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2012-05-24 09:08:30 Plasma processing Technology Physics Etching Plasma CL2 Semiconductor device fabrication Materials science Microtechnology
859	Vac-High PC-Std. 15kV x600 (44mm) Add to Reading List Source URL: www.fab2asm.eu Language: English - Date: 2014-03-04 09:43:57 Electromagnetism Semiconductor device fabrication Semiconductor lasers Microtechnology Electrical engineering Vertical-cavity surface-emitting laser Microelectromechanical systems Laser Through-silicon via Optics Photonics Physics
860	MEMSCAP OPTICAL TECHNOLOGY FINDS EXOPLANETS MEMSCAP provides Boston Micromachines Corporation with Silicon Microchip Deformable Mirrors integrated within the “Gemini Planet Imager” Grenoble, France and Durham, North Add to Reading List Source URL: www.memscap.com Language: English - Date: 2014-08-04 01:50:05 Technology Exoplanetology Optics Boston Micromachines Corporation Telescopes Gemini Planet Imager Mechanical engineering Adaptive optics Deformable mirror Microtechnology Materials science Astronomy

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