biotechnological tools / electronics 277ff / nano-electro-mechanical systems / chemical potential 40ff / metal gate / chemical sensors / activation energy 491f / chemical saturation point / technology requirements 384f / metal oxide-semiconductor / energy 38f / energy 113f / strain energy / chemical mechanical polishing / buffer gas / interference device / addition energy 52f / energy 3f / organic opto-electronics / metal oxide semiconductor / electronics / chemical vapor deposition / information-processing system / alkali metal ion / energy barriers 113f / metal oxide silicon / organic nano-electronics / micro-electromechanical systems / hot carrier injection mode 353ff / chemical force microscopy / chemical solution deposition / energy / /