Capacitively coupled plasma

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1	Control of Ion Energy in a Capacitively Coupled Reactive Ion Etcher H. M. Park , C. Garvin, D. S. Grimard and J. W. Grizzle Electronics Manufacturing and Control Systems Laboratory, Dept. of Electrical Engineering and C Add to Reading List Source URL: web.eecs.umich.edu Language: English - Date: 2016-04-25 13:15:14 Semiconductor device fabrication Plasma physics Plasma processing Physics Manufacturing Electromagnetism Reactive-ion etching Plasma Langmuir probe Etching Capacitor Capacitively coupled plasma
2	Microsoft Word - Open-Course-Plasma-Experiment_A.Dominguez_APS_Nov11_2013.docx Add to Reading List Source URL: www.aps.org Language: English - Date: 2013-11-11 12:16:41 Capacitively coupled plasma Electron Physics Plasma physics Plasma
3	1 1 Introduction to Plasmas Hideo Ikegami Add to Reading List Source URL: www.wiley-vch.de Language: English - Date: 2010-09-28 21:04:22 Astrophysics Plasma Capacitively coupled plasma Inductively coupled plasma Anisothermal plasma Plasma stealth Plasma physics Physics Optical materials