Analytical Techniques for Trace Elemental Analyses on Wafer Surfaces for Monitoring and Controlling Contamination J. Wang, M. K. Balazs Balazs Analytical Laboratory, Sunnyvale, CA[removed]P. Pianetta, K. Baur and S. Brenna

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• Materials science
• Microtechnology
• Vapour phase decomposition
• Wafer
• X-ray fluorescence
• Photolithography
• Thermal oxidation
• Inductively coupled plasma mass spectrometry
• Deep reactive-ion etching
• Semiconductor device fabrication
• Chemistry
• Science