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Nitrides / Semiconductor device fabrication / Electron beam / Electron beam physical vapor deposition / Helmholtz Association of German Research Centres / TBC / Titanium nitride / Coating / Matter / Chemistry / Thin film deposition / Materials science


Microsoft Word - Ph.D thesis_P.Song_final edition.doc
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Document Date: 2012-05-08 04:51:43

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File Size: 1,69 MB

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