Microsoft Word - Ph.D thesis_P.Song_final edition.doc - Titanium nitride - Document - PDFSEARCH.IO

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Date: 2012-05-08 04:51:43 Nitrides Semiconductor device fabrication Electron beam Electron beam physical vapor deposition Helmholtz Association of German Research Centres TBC Titanium nitride Coating Matter Chemistry Thin film deposition Materials science		Microsoft Word - Ph.D thesis_P.Song_final edition.doc Add to Reading List Source URL: wwwzb1.fz-juelich.de Download Document from Source Website File Size: 1,69 MB Share Document on Facebook

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