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Journal of Crystal Growth–99 Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields J. Virbulisa,*, Th. Wetzelb, A.
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Document Date: 2003-02-27 08:19:21
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File Size: 45,92 KB
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City
Hannover /
Germany Institute /
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Company
Siltronic AG /
Elsevier Science B.V. /
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Facility
Germany Institute /
University of Hannover /
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Organization
University of Hannover /
Germany Institute for Electroheat /
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Person
Crystal Growth /
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Position
*Corresponding author /
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Technology
heat transfer /
simulation /
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SocialTag
Semiconductor growth
Czochralski process
Crystallography
Materials science
Mineralogy
Silicon
Heat transfer
Siltronic
Crystal growth
Chemistry
Journal of Crystal Growth–99 Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields J. Virbulisa,*, Th. Wetzelb, A.