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Leptons / Quantum electrodynamics / Semiconductor device fabrication / Annealing / Ion implantation / Electron / Positron / Silicon on insulator / Physics / Condensed matter physics / Materials science
Date: 2003-02-11 04:16:40
Leptons
Quantum electrodynamics
Semiconductor device fabrication
Annealing
Ion implantation
Electron
Positron
Silicon on insulator
Physics
Condensed matter physics
Materials science

JOURNAL OF APPLIED PHYSICS VOLUME 90, NUMBERDECEMBER 2001

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