Rigorous coupled-wave analysis

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1Efficient analysis of deep high-index-contrast gratings under arbitrary illumination Nojan Motamedi,1,* Amir Shlivinski,2 Joseph E. Ford,1 and Vitaliy Lomakin1 1 2

Efficient analysis of deep high-index-contrast gratings under arbitrary illumination Nojan Motamedi,1,* Amir Shlivinski,2 Joseph E. Ford,1 and Vitaliy Lomakin1 1 2

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Source URL: psilab.ucsd.edu

Language: English - Date: 2016-03-02 14:16:44