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182 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 3, JUNE 2002 Sub-10 cm3 Interferometric Accelerometer With Nano-g Resolution
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Document Date: 2011-02-10 14:18:34
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182 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 3, JUNE 2002 Sub-10 cm3 Interferometric Accelerometer With Nano-g Resolution