Monolithic fabrication of millimeter-scale machines

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Date: 2012-05-23 11:36:44 Technology Transducers Semiconductor device fabrication RF MEMS Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Sensor Microtechnology Materials science Nanotechnology		Monolithic fabrication of millimeter-scale machines Add to Reading List Source URL: micro.seas.harvard.edu Download Document from Source Website File Size: 2,92 MB Share Document on Facebook

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