Platinum silicide

Results: 2



#Item
1Semiconductor device fabrication / Anions / Silicide / Materials science / Platinum silicide / Titanium disilicide / Salicide / MOSFET / Polycrystalline silicon / Chemistry / Matter / Silicon

1170 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 55, NO. 5, MAY 2008 Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific

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Source URL: doc.utwente.nl

Language: English - Date: 2011-08-28 12:36:23
2Materials science / Silicon / Anions / Silicide / MOSFET / Platinum silicide / Electrical resistivity and conductivity / Ion implantation / Titanium nitride / Chemistry / Matter / Semiconductor device fabrication

PI.1 Pattern-Independent, Fine-Morphology Ni-Pt Silicide Formation by Partial Conversion with Low Metal-Consumption Ratio

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Source URL: www.levitech.nl

Language: English - Date: 2010-07-01 10:17:28
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