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Surface Cleaning and Wet Processing Terminology Contributions by Motorola Corporation
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Document Date: 1999-12-02 13:39:32


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File Size: 33,00 KB

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Company

RCA Laboratories / The University of Arizona HF / Olin / Motorola Corporation / Dilute HF / Hydrofluoric Acid Filtered Acid Recirculation Module HF / /

Facility

The University of Arizona HF FARM / /

IndustryTerm

solvent processing / conductive metal layer / residual chemicals / chemical concentration / high energy processes / sealed stainless steel process chamber / metal contaminants / high energy processing / metal residues / power acoustic energy waves / chemical processing / energy aids / chemical mixture consisting / viscous chemical residues / surface chemical reactions / chemical process tank / metal deposition / metal silicides / fresh solution / high grade stainless steel / chemical residues / chemical oxides / /

Organization

Bank of England / University of Arizona HF FARM / /

Person

Meg Tank / /

Technology

condensation / fluid dynamics / CVD / Chemical Vapor Deposition / /

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