F R A U N H O F E R I N S T I T U T E F O R I N T E G R AT E D S Y S T E M S A N D D E V I C E T E C H N O L O G Y I I S B SERVICES AND SOLUTIONS FOR LARGE AREA NANOIMPRINT TECHNOLOGY CONTACT - PDMS stamp - Document - PDFSEARCH.IO

First Page	Meta Content
	F R A U N H O F E R I N S T I T U T E F O R I N T E G R AT E D S Y S T E M S A N D D E V I C E T E C H N O L O G Y I I S B SERVICES AND SOLUTIONS FOR LARGE AREA NANOIMPRINT TECHNOLOGY CONTACT Add to Reading List Document Date: 2015-06-09 14:26:46 Open Document File Size: 899,92 KB Share Result on Facebook Company D S Y S T E M S A / / / / IndustryTerm quartz carrier plate / carrier plate / manufacturing / µm quartz carrier plate / e-beam / lithography technologies / / Organization SERVICES AND SOLUTIONS FOR LARGE AREA NANOIMPRINT TECHNOLOGY CONTACT Fraunhofer Institute for Integrated Systems / / Person Mathias Rommel / / / Technology lithography / lithography technologies / / URL www.iisb.fraunhofer.de / / SocialTag Semiconductor device fabrication Silicones PDMS stamp Nanoimprint lithography Ultraviolet Wafer Etching Gallium nitride Polydimethylsiloxane Chemistry

F R A U N H O F E R I N S T I T U T E F O R I N T E G R AT E D S Y S T E M S A N D D E V I C E T E C H N O L O G Y I I S B SERVICES AND SOLUTIONS FOR LARGE AREA NANOIMPRINT TECHNOLOGY CONTACTAdd to Reading List