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Microtechnology / Physics / Electrical engineering / Mechanical engineering / Microelectromechanical systems / Sensors / Accelerometer / Strength of materials / Polycrystalline silicon / Materials science / Transducers / Technology


Multi-scale Analysis of MEMS Sensors Subject to Drop Impacts
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Document Date: 2007-09-07 04:43:21


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File Size: 1,17 MB

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