Multi-scale Analysis of MEMS Sensors Subject to Drop Impacts

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Date: 2007-09-07 04:43:21 Microtechnology Physics Electrical engineering Mechanical engineering Microelectromechanical systems Sensors Accelerometer Strength of materials Polycrystalline silicon Materials science Transducers Technology		Multi-scale Analysis of MEMS Sensors Subject to Drop Impacts Add to Reading List Source URL: www.mdpi.org Download Document from Source Website File Size: 1,17 MB Share Document on Facebook

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