www.elettra.trieste.it Elettra Sincrotrone Trieste Deep X-Ray Lithography E

First Page		Document Content
Date: 2012-10-15 05:11:07 Electromagnetism Microtechnology ELETTRA Trieste X-ray lithography Microelectromechanical systems Synchrotron Beamline Physics Particle accelerators Materials science		www.elettra.trieste.it Elettra Sincrotrone Trieste Deep X-Ray Lithography E Add to Reading List Source URL: www.elettra.trieste.it Download Document from Source Website File Size: 2,46 MB Share Document on Facebook

	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 12, NO. 6, DECEMBERThermocapillary Actuation of Droplets on Chemically Patterned Surfaces by Programmable DocID: 1u77o - View Document
	Microsoft Word - 03-YCai_MEMSIC_CStudy_jw6_dh1_20081023.doc DocID: 1r6kx - View Document
	VG800 LOW DRIFT MEMS VERTICAL GYRO The MEMSIC VG800 establishes a new level of performance for standalone “unaided” inertial DocID: 1r3e5 - View Document
	Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography V. Singh1, J. Goettert1, O. Jinka1,2,* 1 Center for Advanced Microstructures and Devices (CAMD) DocID: 1qVW9 - View Document
	PRESS RELEASERUSNANO Exits from SiTime with Yield Above 25% RUSNANO is exiting its portfolio investment in SiTime Corporation (Sunnyvale, USA), which develops high-performance semiconductor chips using MEMS t DocID: 1qQgR - View Document