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#	Item
571	Reliability of a MEMS Actuator Improved by Spring Corner Designs and Reshaped Driving Waveforms Add to Reading List Source URL: www.mdpi.org Language: English - Date: 2007-09-04 05:01:13 Microtechnology Mechanical engineering Electrical engineering Microelectromechanical systems Transducers Accelerometer Vibration Optical fiber Resonance Physics Technology Materials science
572	www.advmat.de www.MaterialsViews.com COMMUNICATION Directional Transport of Polymer Sheet and a Microsphere Add to Reading List Source URL: www.nanoscience.gatech.edu Language: English - Date: 2012-01-03 20:58:56 Microtechnology Plastics Organic polymers Organic semiconductors Etching Polyethylene terephthalate Thin film Sputtering Poly Chemistry Materials science Optical materials
573	ARTICLE Piezo-phototronic Eﬀect Enhanced Visible and Ultraviolet Photodetection Using a ZnOCdS CoreShell Micro/nanowire Add to Reading List Source URL: www.nanoscience.gatech.edu Language: English - Date: 2012-10-05 14:40:59 Semiconductor devices Microtechnology Nanotechnology Zinc oxide Piezotronics Nanowire Responsivity Light-emitting diode Ultraviolet Chemistry Materials science Electromagnetic radiation
574	Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors Add to Reading List Source URL: www.mdpi.org Language: English - Date: 2007-05-24 07:46:10 Electromagnetism Microelectromechanical systems Accelerometer Surface micromachining Piezoresistive effect Industrial etching Abrasive Deep reactive-ion etching Abrasive blasting Microtechnology Materials science Technology
575	Characterizing individual SnO2 nanobelt field-effect transistors and their intrinsic responses to hydrogen and ambient gases Add to Reading List Source URL: www.nanoscience.gatech.edu Language: English - Date: 2012-11-05 20:36:34 Gas sensors Sensors Nanoelectronics Hydrogen sensor Microtechnology Ohmic contact Oxygen sensor Transistor Field-effect transistor Chemistry Technology Materials science
576	Heterogeneous Integration Provides Innovative Smart Systems Approach Smart Systems Integration International Conference & Exhibition Zurich, Switzerland March 21th, 2012 Add to Reading List Source URL: www.smart-systems-integration.org Language: English - Date: 2012-03-30 07:08:43 Smart grid Microelectromechanical systems Advanced manufacturing Smart system Energy development Microelectromechanical system oscillator Technology Microtechnology Energy policy
577	Design and Fabrication of a Silicon-Based MEMS Rotary Engine Add to Reading List Source URL: www.me.berkeley.edu Language: English - Date: 2002-10-04 20:52:04 Technology Microelectromechanical systems Etching Deep reactive-ion etching Microfabrication Advanced Silicon Etch Photoresist Wankel engine Wafer Materials science Semiconductor device fabrication Microtechnology
578	Microsoft Word - resume_Monika_Weber Add to Reading List Source URL: www.eng.yale.edu Language: English - Date: 2014-10-10 14:36:08 Microfluidics Microtechnology Electrical engineering Physics Microelectromechanical systems Materials science Nanotechnology Technology
579	Nano Energy (]]]]) ], ]]]–]]] 1 Available online at www.sciencedirect.com Add to Reading List Source URL: www.nanoscience.gatech.edu Language: English - Date: 2012-12-13 18:35:40 Microtechnology Lighting Light-emitting diodes Engines Nanogenerator Nanotechnology Energy harvesting Electric generator Audio power Chemistry Materials science Technology
580	Microsoft Word - sensors-mems[removed]figures.doc Add to Reading List Source URL: www.mdpi.org Language: English - Date: 2008-02-06 03:13:46 Mechanical engineering Nanotechnology Engineering Transducers Semiconductor device fabrication Microelectromechanical systems RF MEMS Cantilever Residual stress Materials science Microtechnology Technology

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