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Microfabrication
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#	Item
71	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 10:40:36 Microelectromechanical systems Surface micromachining Etching Comb drive Microfabrication Deep reactive-ion etching Advanced Silicon Etch CMOS Micromachinery Microtechnology Materials science Technology
72	Next-generation Key CMOS Technologies Variation-Aware Design for Nanometer Generation LSI HIRATA Morihisa, SHIMIZU Takashi, YAMADA Kenta Abstract Advancement in the microfabrication of semiconductor chips has made the v Add to Reading List Source URL: www.nec.com Language: English - Date: 2012-09-11 09:28:30 Integrated circuits Digital electronics Electronic design MOSFET Very-large-scale integration CMOS Semiconductor device fabrication Threshold voltage Electronic engineering Electronics Electrical engineering
73	Fragebogen Projekt-Reporting Add to Reading List Source URL: www.ccem.ch Language: English - Date: 2014-03-17 10:46:49 Energy Microtechnology Membrane technology Hydrogen technologies Electrochemistry Solid oxide fuel cell Yttria-stabilized zirconia Microelectromechanical systems Microfabrication Chemistry Technology Fuel cells
74	US-Rev3 26 March 1997 With respect to any product described in or for Attachment B to the Annex to the Ministerial Declaration on Trade in Information Technology Products (WT/MIN[removed]), to the extent not specifically Add to Reading List Source URL: www.wto.org Language: English - Date: 2001-06-01 18:00:00 Materials science Microtechnology Wafer Integrated circuit Light-emitting diode Semiconductor Equipment and Materials International Microfabrication Semiconductor device fabrication Semiconductor devices Technology
75	Mechanical Model of MEPV module with front contact cells and silicone lens Add to Reading List Source URL: www.sandia.gov Language: English - Date: 2015-01-27 18:35:56 Semiconductor devices Microtechnology Semiconductor device fabrication Optics Inorganic compounds Microfabrication Microelectromechanical systems Integrated circuit Photonics Chemistry Technology Materials science
76	MECHANICAL ENGINEERING GRADUATE SEMINAR Co-sponsored by NNSA PRISM Center SEPTEMBER 6TH, 2012 4:30 p.m. room 1061 Prof. Gary Fedder Institute for Complex Engineered Systems, Add to Reading List Source URL: www.purdue.edu Language: English RF MEMS Microelectromechanical systems Microfabrication Microsystem Microelectromechanical system oscillator Microtechnology Materials science Technology
77	PAUL SCHERRER INSTITUT Technology Transfer R&D Services Add to Reading List Source URL: www.psi.ch Language: English - Date: 2014-11-28 07:19:08 Nanoimprint lithography Nanolithography Nanotechnology Photolithography Electron beam lithography Interference lithography Lithography Microelectromechanical systems Microfabrication Materials science Technology Microtechnology
78	Micro-Scale Mobile Robotics Add to Reading List Source URL: nanolab.me.cmu.edu Language: English - Date: 2012-11-16 19:15:39 Technology Nanotechnology Microbotics Emerging technologies Nanorobotics Robot Microelectromechanical systems Swarm behaviour Microfabrication Microtechnology Materials science Robotics
79	Supplementary Material for “Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits” C. M. Quintana,1 A. Megrant,1 Z. Chen,1 A. Dunsworth,1 B. Chiaro,1 R. Barends,1 Add to Reading List Source URL: web.physics.ucsb.edu Language: English - Date: 2014-08-14 14:18:10 Semiconductor device fabrication Science Thin film deposition Physics Electromagnetism Electron beam lithography Focused ion beam Resonator Electron microscope Materials science Microtechnology Electron microscopy
80	F R A U N H O F E R I N S T I T U Te f o r M i c r o e l e c t r o n i c c ir c ui t s a n d S y s t ems I M S Fraunhofer IMS Add to Reading List Source URL: www.ims.fraunhofer.de Language: English - Date: 2014-08-08 09:15:33 Microtechnology Sensors Transducers Nanotechnology Biotechnology Microelectromechanical systems Biosensor Fraunhofer Society Microfabrication Technology Materials science Physics

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