 RF MEMS Semiconductor devices Microelectromechanical systems Capacitor Gate oxide IEEE Kiyo Tomiyasu Award Materials science Technology Electromagnetism | | PRISM Seminar Series – Spring 2009 Modeling of Dielectric Charging in RF MEMS Prof. Ashraf Alam Purdue University School of Electrical and Computer EngineeringAdd to Reading ListSource URL: www.purdue.eduDownload Document from Source Website File Size: 225,14 KBShare Document on Facebook
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