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Oxides / Thin film deposition / Ceramic materials / Semiconductor device fabrication / Digital electronics / Atomic layer deposition / Hafnium(IV) oxide / MOSFET / Equivalent oxide thickness / Chemistry / Electromagnetism / Matter


Eur. Phys. J. Appl. Phys. 28, 265–[removed]DOI: [removed]epjap:[removed]
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Document Date: 2005-04-28 19:13:20


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File Size: 1,97 MB

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