MEMS thermal actuator

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1Actuators / Microtechnology / MEMS thermal actuator / Nanoelectronics / Bending / Laser beam profiler / Materials science / Mechanics / Physics

586 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 21, NO. 3, JUNE 2012 Improved Designs for an Electrothermal In-Plane Microactuator

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Source URL: www.pskl.ust.hk

Language: English - Date: 2014-10-10 02:44:40
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