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Chapter 12 in Iterative Identification and Control, P. Albertos and A. Sala (Eds.), Springer Verlag, 2002 Control Relevant Identi cation and Robust Motion Control of a Wafer Stage Raymond A. de Callafon1 and Paul M.J. Va
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Document Date: 2009-11-25 01:57:50
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Chapter 12 in Iterative Identification and Control, P. Albertos and A. Sala (Eds.), Springer Verlag, 2002 Control Relevant Identi cation and Robust Motion Control of a Wafer Stage Raymond A. de Callafon1 and Paul M.J. Va