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DYNAMIC PREDICTION OF THE ENTIRE CZOCHRALSKI GROWTH PROCESS AND USE OF THE OFF-LINE CONTROL TECHNIQUE TO OPTIMIZE CRYSTAL SHAPE AND QUALITY R. Rolinsky2*, L. Wu1, M. Jacot2, R. Ramaya Selvaraj2, A. de Potter2, N. Van den
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Document Date: 2013-10-16 08:56:07
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DYNAMIC PREDICTION OF THE ENTIRE CZOCHRALSKI GROWTH PROCESS AND USE OF THE OFF-LINE CONTROL TECHNIQUE TO OPTIMIZE CRYSTAL SHAPE AND QUALITY R. Rolinsky2*, L. Wu1, M. Jacot2, R. Ramaya Selvaraj2, A. de Potter2, N. Van den