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Integrated circuits / Silicon / RF MEMS / Silicon-germanium / Electronic design / Microelectromechanical systems / Resonator / Polycrystalline silicon / CMOS / Chemistry / Electronic engineering / Physics


Poly-Sige: A High-Q Structural Material for Integrated RF MEMS
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Document Date: 2007-03-04 14:11:52

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File Size: 892,02 KB

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