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 Date: 2012-06-03 09:29:18Electronics Crystal oven Crystal oscillator Quartz Resonator Oscillation Quartz clock Microelectromechanical system oscillator Oscillators Electromagnetism Physics |
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| APPLIED PHYSICS LETTERS 95, 103111 共2009兲 Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films R. B. Karabalin,1 M. H. Matheny,1 X. L. Feng,1 E. Defaÿ,2 G. Le Rhun,2 C. Marcoux,2 S. HDocID: 1qU0h - View Document |