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| First Page | Document Content | |
|---|---|---|
 Date: 2009-07-22 04:51:36Manufacturing Semiconductor device fabrication Technology Plasma processing Materials science Physical vapor deposition Thin film Thermal spraying Chemical vapor deposition Thin film deposition Chemistry Coatings |
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| Microsoft Word - P-Met-540DocID: 1rt8z - View Document |
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| MATEC Web of Conferences 30, DOI: m atec conf 0 8 C Owned by the authors, published by EDP Sciences, 2015 Deposition and Characterization of the Titanium-Based Coating by aDocID: 1qUVd - View Document |