Optical properties of oxide thin films deposited by reactive HiPIMS

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Date: 2011-08-11 02:54:21 Manufacturing Coatings Physics Semiconductor device fabrication Plasma processing Sputter deposition Sputtering Thin film Titanium dioxide Chemistry Thin film deposition Materials science		Optical properties of oxide thin films deposited by reactive HiPIMS Add to Reading List Source URL: liu.diva-portal.org Download Document from Source Website File Size: 439,00 KB Share Document on Facebook

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