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Materials science / Condensed matter physics / Semiconductor device fabrication / Nuclear physics / Surface chemistry / Ion implantation / Collision cascade / X-ray photoelectron spectroscopy / Stopping and Range of Ions in Matter / Physics / Chemistry / Science
Date: 2010-08-04 14:09:50
Materials science
Condensed matter physics
Semiconductor device fabrication
Nuclear physics
Surface chemistry
Ion implantation
Collision cascade
X-ray photoelectron spectroscopy
Stopping and Range of Ions in Matter
Physics
Chemistry
Science

APPLIED PHYSICS LETTERS VOLUME 85, NUMBER[removed]OCTOBER 2004

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