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 Date: 2008-10-23 17:51:20Semiconductor device fabrication Etching Photolithography Photoresist Thin-film transistor Materials science Microtechnology Technology |
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Date: 2008-10-23 17:51:20Semiconductor device fabrication Etching Photolithography Photoresist Thin-film transistor Materials science Microtechnology Technology |
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APPLIED PHYSICS LETTERS VOLUME 83, NUMBER[removed]OCTOBER 2003