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Photon Factory Activity Report 2009 #27 Part BSurface and Interface 2C/2008S2003 Annealing effects of in-depth profiles in TiN/LaO/HfSiO/SiO2/Si gate stack
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Document Date: 2010-12-27 22:22:07
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Photon Factory Activity Report 2009 #27 Part BSurface and Interface 2C/2008S2003 Annealing effects of in-depth profiles in TiN/LaO/HfSiO/SiO2/Si gate stack