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Proceedings of the 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems January 20-23, Xiamen, China Stiction of Parylene C to Silicon Surface Measured using Blister Tests
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Document Date: 2017-03-21 04:13:56
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Proceedings of the 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems January 20-23, Xiamen, China Stiction of Parylene C to Silicon Surface Measured using Blister Tests